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Microelectromechanical Structures for Materials Research: Symposium Held April 15-16, 1998, San Francisco, California, U.S.A

Microelectromechanical Structures for Materials Research: Symposium Held April 15-16, 1998 , San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 518.)

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Microelectromechanical Structures for Materials Research: Symposium Held April 15-16, 1998, San Francisco, California, U.S.A

Microelectromechanical Structures for Materials Research: Symposium Held April 15-16, 1998 , San Francisco, California, U.S.A (Materials Research Society Symposia Proceedings, V. 518.)

4.85 62,964 ratings · 3,712 reviews
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Overview: Microelectromechanical systems (MEMS) have been used for materials research and characterization for many years. These devices permit measurement of thin-film and small-scale properties with remarkable sensitivity and accuracy. With the increasing development of these MEMS structures, however, comes important questions about the materials used to fabricate them. The long-term stability, residual stress, elastic properties and strength of the MEMS materials are vital for the effective use of the systems. Yet as work on MEMS materials testing strives forward, a pressing need for an organized gathering of investigators specifically interested in the topic has grown apparent. This volume from MRS addresses that need and represents one of the first efforts to collect research that spans both the materials research and MEMS communities. Investigations that are extendable beyond MEMS to general materials characterization are emphasized.

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Published June, 1998
ISBN 3280246
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Stuart B. Brown writes contemporary fiction and has always been fascinated by character-driven stories. They hold a degree in English Literature and previously worked as an editor before transitioning to writing their own books. Stuart B. Brown lives with their spouse and a very vocal rescue cat.

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Masterpiece from start to finish. I adored how the story unfolded. It kept me captivated without sacrificing elegance. I will undoubtedly revisit this masterpiece.
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